High-precision Visual Inspection System DAVI-1200
| Product Name | High-precision Visual Inspection System |
|---|---|
| Type | DAVI-1200 |
| Manufacturer | Daitron Co., Ltd. |
| Manufacturer logo |  |
Overview
This equipment can easily perform high-precision visual inspections such as dimension measurement and scratch inspections of semiconductor chips.
- High-speed deep focus measurement (multifocal imaging)
- High-precision measurement
- User-friendly software
Feature
High-speed deep focus measurement (multifocal imaging)
Z-axis image combining processing enables deep focus images to be acquired at high speed with a high-magnification lens.
In addition, plane correction of inclined work is also possible.
In combining 20 images at 1-μm pitch: at 200 msec or below (the processing time will vary according to the number of images to be acquired)
High-precision measurement
Can detect 1 μm or smaller edge defects and scratches. (at 20x)
Can also perform edge inspections for chips from and protrusions beyond an arbitrary line.
User-friendly software
HALCON-based image processing flows can be prepared by drag & paste.
High-performance HALCON libraries can be used without programming knowledge.
Free choice of hardware
Any equipment in the market such as cameras, lenses, and PCs can be used freely.
Real-time observation with line scan camera is also possible.
DAVI-1200 will enable you to make the best choice suitable to your specifications.
Main Specifications
Standard equipment specifications
| Equipment name | High-precision Visual Inspection System DAVI-1200 |
| Measurement stage | X,Y：□200 mm area θ-axis ±15° |
| Autofocus |
Z-axis (setting resolution 0.1 μm), high-speed autofocus (200 msec/20 images) * Will vary according to the exposure time |
| Object lens | 20x (optional) |
| Inspection resolution | Can inspect contamination and scratches of 1 μm, resolution 0.25 μm (at 20x) |
| Lighting | Coaxial vertical illumination (3-color high-intensity LED), ring lighting (3-color LED light: low angle) |
| Anti-vibration table | Passive vacuum anti-vibration table |
| Control | PC (Windows base) |
| Function | Automatic inspection sequence, variety registration, logging function (result data and image) |
| Image processing | HALCON-based original UI |
| Option | Deep learning (AI) function, side angle observation camera |
* The inspection stage stroke is customizable. We design to the inspection objects.
Standard inspection specifications
| Image combining | Z-axis image combining function at arbitrary pitch, tilt compensation combining |
| Two-position focus image combining, irregularity determination, plane combining | |
| Positioning | Pattern matching (boundary/normal correlation), edge position, pair edge, circle position, position correction |
| Identification | OCR, 2-dimensional code |
| Inspection | Trend edge, depth inspection, color extraction, blob, dynamic threshold, feature extraction, defect extraction |
| Measurement | Focus image acquisition, various dimension measurement tools |
| Filter |
Gray conversion, color space conversion, contrast conversion, gray value distribution measurement, Average gray value distribution measurement |
| Dilation/erosion filter, opening/ending filter | |
| Bottom hat, top hat, highpass, averaging, median, smoothing | |
| Laplacian filter, edge emphasis, contrast emphasis, binarization, inversion | |
| Gray value scaling, clipping, gray value distance | |
| Light density, threshold range | |
| Image computation | Various computing |
| Statistics | Maximum, minimum, mean, standard deviation |
| Output | Numeric output, calibration output |
| Drawing creation | Point creation, line creation, circle creation |
* Inspection tools other than the above will be prepared according to the inspection contents.
Currently these products does not comply with US/EU electrical safety standards. Any customer who may require UL, CE, etc. please let Daitron know.