Product Information

High-precision Visual Inspection System (6 sides) DAVI-6000

Product Name High-precision Visual Inspection System (6 sides)
Type DAVI-6000
Manufacturer Daitron Co., Ltd.
Manufacturer logo

Overview

This equipment can easily perform high-precision visual inspections such as dimension measurement and scratch inspections of semiconductor chips.

  • High-speed deep focus measurement (multifocal imaging)
  • High-precision measurement
  • User-friendly software
  • High-speed 6-face inspection and measurement
  • Damageless handling mechanism

DAVI-Engine (Daitron Automatic Visual Inspection Engine) Introduction    davi_logo_blue.png

"DAVI Engine" is a generic name of the Company's core technologies optimized on an advanced level by integrating AI (deep learning) with our D&P Company's know-how in high-precision optical imaging technologies & equipment system technologies.

With our application carrying this Engine, we provide solutions ranging from development machines to fully automatic inspection equipment, to contribute to releasing operators from visual inspection of products.

https://www.daitron.co.jp/en/products/solution_automatic_visual_inspection.html

Feature

High-speed deep focus measurement (multifocal imaging)

Z-axis image combining processing enables deep focus images to be acquired at high speed with a high-magnification lens.
 In addition, plane correction of inclined work is also possible.
 In combining 20 images at 1-μm pitch: at 200 msec or below (the processing time will vary according to the number of images to be acquired)

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High-precision measurement

Can detect 1 μm or smaller edge defects and scratches. (at 20x)
Can also perform edge inspections for chips from and protrusions beyond an arbitrary line.

06_高精度測定.jpg

User-friendly software

HALCON-based image processing flows can be prepared by drag & paste.
High-performance HALCON libraries can be used without programming knowledge.

自由組み換え.png

Free choice of hardware

Any equipment in the market such as cameras, lenses, and PCs can be used freely.
Real-time observation with line scan camera is also possible.
DAVI-6000 will enable you to make the best choice suitable to your specifications.

04_自由なハードウェア選択1.jpg05_自由なハードウェア選択2.jpg

Main Specifications

Standard equipment specifications

Equipment name High-precision Visual Inspection System (6 sides) DAVI-6000
Measurement stage

6-face stage specifications (front-end face, right side/top surface, back-end face, left side face)

The bottom face is measured at transport 

Autofocus

Z-axis (setting resolution 0.1 μm), high-speed autofocus (200 msec/20 images)

* Will vary according to the exposure time

Object lens 20x (optional)
Inspection resolution Can inspect contamination and scratches of 1 μm, resolution 0.25 μm (at 20x)
Lighting Coaxial vertical illumination (3-color high-intensity LED), ring lighting (3-color LED light: low angle)
Anti-vibration table Active vacuum anti-vibration table
Control PC (Windows base)
Function

Automatic inspection sequence, variety registration, logging function (result data and image)

Automatic stage cleaning, collet correction, consumables management

Image processing HALCON-based original UI
Option Deep learning (AI) function

  * The inspection stage stroke is customizable. We design to the inspection objects.

Standard inspection specifications

Image combining Z-axis image combining function at arbitrary pitch, tilt compensation combining
Two-position focus image combining, irregularity determination, plane combining
Positioning Pattern matching (boundary/normal correlation), edge position, pair edge, circle position, position correction
Identification OCR, 2-dimensional code
Inspection Trend edge, depth inspection, color extraction, blob, dynamic threshold, feature extraction, defect extraction 
Measurement Focus image acquisition, various dimension measurement tools
Filter

Gray conversion, color space conversion, contrast conversion, gray value distribution measurement,

Average gray value distribution measurement

Dilation/erosion filter, opening/ending filter
Bottom hat, top hat, highpass, averaging, median, smoothing
Laplacian filter, edge emphasis, contrast emphasis, binarization, inversion
Gray value scaling, clipping, gray value distance
Light density, threshold range
Image computation Various computing
Statistics Maximum, minimum, mean, standard deviation
Output Numeric output, calibration output
Drawing creation Point creation, line creation, circle creation

  * Inspection tools other than the above will be prepared according to the inspection contents.

currently these products does not comply with US/EU electrical safety standards. Any customer who may require UL, CE, etc. please let Daitron know.

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